GETEROTUZILMALARNI TAYYORLASH TEXNOLOGIYASINI O‘RGANISH VA TAHLIL ETISH
Keywords:
molekulyar-nur epitaksiya usuli; gaz fazasidano‘stirish, elektron – kovak, integral sxemalar, monokristallar,Choxral usuli,inertgaz ostida kvarts tigeli,nitrit bor tigeli.Abstract
Ushbu maqolada, “Geteroo‘tishli yarimo‘tkazgichli elektronika” yo‘nalishiga asos solinishining zamonaviy ilmiy tadqiqot ishlarining nazariyasini amaliy jixatdan: GaAs- Arsenid-Galliy material olishning tehnologik uslublari va yarimo‘tkazgichli yo‘nalishli qatlam, p-n gomo va geteroo‘tishlar asosidagi ko‘p qatlamli tuzilmalar olish tehnologiyasi o‘rganilgan va tahlil qilingan sharxlari keltirilgan.
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